IMNANOTECH co.ltd., - Cheonan

Imnanotech Mca heater manufacturer Korea .Mca heater used increasing
refurbished life-span up to 30% more than AMAT original new one. We are supply the all over the world.


Imnanotech is a Leading Developer, Manufacturer and Supplier of Electrostatic Chucks Worldwide. It is the only company that is making ESC for all applications, currenty has over 120 different products. It holds multiple proprietary ESC technologies and engaged in JDA (Joint Development Agreement) with 6 Major Fabs globally Imnanotech co. ltd., we are leading manufacturer and refurbishing heater in Korea and worldwide. Our products are mca heater, cvd aln heater, magnet assy,aln heater dimple, pvd mca e-chuck. In addition, we have plans to develop various esc including ODF esc which uses LED, OLED. We develop &  

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supply more Countries. Contact us for more details. We have an extensive stock of surplus parts and 2nd source parts, largely for AMAT, Centura, Endura, HDP Ultima Plus, Novellus, LAM, Mattson, TEL Parts, IMP Parts, etc. This stock changes regularly as we gain excess items from our many equipment refurbishment projects, so please contact us or check back here for updates. Use the Search Function below to check our parts inventory by part number or keyword (lower case only). Following are examples of Invax's ESC. Through collaboration with the Fabs and our team of Engineering providing Applications and On-site supports, we have demonstrated in contributing significantly in reducing the Cost of Ownership. We appreciate very much tor your interests to our company and products and welcome to our Imnanotech web site. We are very pleased to see you customers through a new world of internet. Our company was founded in 2011 and we have been refurbishing consumable assembly parts of semi-conductor professionally since its foundation. We have special laboratories and refurbishing plants both in Korea and in China. Our main items are followings ; Many kinds of AMAT Ceramic Heater, Novellus HDP ESC, Many kinds of 200mm MCA heater and 300mm MCA heater. Many kinds of Magnet Assy, Particularly, in case of Ceramic Heater, MCA Heater, and Magnet Assy, we¡¯ve been refurbishing for 5years, and we started conducting business. GBS supports all Invax Technologies' products in the Asia Pacific region, including Japan. However, we have overcome the early difficulties we had confronted, accumulated our own know-how we had acquired through many failures experienced, and technical development, and currently, now failure rate is less than 5% for years. In spite of superior technology, we sometimes fail to refurbish in early times because there¡¯s numerous type of defects in a product. Imnanotech., Co. Ltd 12-10, Sarian-Gil, Seotan-Myeon Gyeonggido Pyeong Taek-Si South Korea -451852(Republic Of Korea) Tel : 82-10-49945667 , Fax : 82-31-6635676